Specific Process Knowledge/Direct Structure Definition: Difference between revisions
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== Choose method of structuring/equipment == | == Choose method of structuring/equipment == | ||
*[[Specific Process Knowledge/ | ** [[Specific Process Knowledge/Lithography/3DLithography|2-Photon Polymerization Lithography]] | ||
*[[Specific Process Knowledge/ | ** [[Specific Process Knowledge/Back-end processing/Polymer Injection Molder|Polymer Injection Molder]] | ||
*[[Specific Process Knowledge/ | ** [[Specific Process Knowledge/Lithography/NanoImprintLithography|Nano Imprint Lithography]] | ||
*[[Specific Process Knowledge/Back-end processing/ | ** [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool|Laser Micromachining Tool/ablation]] | ||
** Dicing saw | |||
== Materials for structuring == | == Materials for structuring == | ||
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** Topas | ** Topas | ||
*** [[Specific Process Knowledge/Back-end processing/Polymer Injection Molder|Polymer Injection Molder]] | *** [[Specific Process Knowledge/Back-end processing/Polymer Injection Molder|Polymer Injection Molder]] | ||
*** | *** [[Specific Process Knowledge/Lithography/NanoImprintLithography|Nano Imprint Lithography]] | ||
*** [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool|Laser ablation]] | |||
** PMMA | ** PMMA | ||
*** | *** [[Specific Process Knowledge/Lithography/NanoImprintLithography|Nano Imprint Lithography]] | ||
*** [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool|Laser ablation]] | |||
** AZ resists | ** AZ resists | ||
*** [[Specific Process Knowledge/Lithography/3DLithography|2-Photon Polymerization Lithography]] | *** [[Specific Process Knowledge/Lithography/3DLithography|2-Photon Polymerization Lithography]] | ||
** ... | ** ... | ||
*Metals | *Metals/Silicon/Graphene | ||
**[[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool|Laser ablation]] | **[[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool|Laser ablation]] | ||
*Glass | *Glass | ||
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** dicing saw | ** dicing saw | ||
**[[/Sandblasting|Sandblasting (at DTU Nanotech).]] | **[[/Sandblasting|Sandblasting (at DTU Nanotech).]] | ||
== Comparison of equipment/material == | == Comparison of equipment/material == | ||