Specific Process Knowledge

2nd Level - Process Topic

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Choose the process topic you are interested in

• Back-end processing

• Characterization

• E-beam lithography

• Etch

• Imprinting

• Lithography

• Thermal Process

• Thin film deposition

• Wafer and sample drying

• Wafer Bonding

• Wafer Cleaning

• Wafer Information

• III-V Process

Overview of sample processing

Clean the sample

Drying Samples

Make a layer on the sample or Film Formation
Thermal Oxide growth
Physical Vapour Deposition
	Sputter deposition
	Thermal deposition
	E-beam evaporation
CVD
	LPCVD
	PECVD
Coating
	Spin coating
	Spray coating
Electroplating
Epitaxial growth

Thermal treatment of the sample

Make a mask on the sample
Lithography
Imprinting

Transfer pattern into the sample
Wet etch
Dry etch
Lift-off

Direct structure definition
Imprinting
LASER machining
Lithographic definition
Polymer Injection molding

Bonding samples together

Characterize the sample

Back end of the sample
Chip/die mounting
Wire bonding
Dicing

Overview of sample processing 2

Clean the sample	Drying Samples	Film Formation Thermal Oxide growth Thin Film deposition Sputter deposition Thermal deposition E-beam evaporation CVD LPCVD PECVD Coating Spin coating Spray coating Electroplating Epitaxial growth	Thermal treatment of the sample
Make a mask on the sample Lithography Imprinting	Transfer pattern into the sample Wet etch Dry etch Lift-off	Direct structure definition Imprinting LASER machining Lithographic definition Polymer Injection molding	Bonding samples together
Characterize the sample	Back end of the sample Chip/die mounting Wire bonding Dicing

Overview of sample processing 3

Clean your sample

Drying your Samples

Create a layer/film on your sample
Thermal Oxide growth
Thin film deposition
	Sputter deposition
	Thermal deposition
	E-beam evaporation
	LPCVD
	PECVD
Coating
	Spin coating
	Spray coating
Electroplating
Epitaxial growth

Thermal treatment of your sample

Make a mask on your sample
Lithography
Imprinting

Transfer mask pattern to your sample
Wet etch
Dry etch
Lift-off

Direct structure definition on your sample
Imprinting
LASER machining
Lithographic definition
Polymer Injection molding

Bonding your samples together

Characterize your sample

Back end processing of your sample
Chip/die mounting
Wire bonding
Dicing