Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide: Difference between revisions
Appearance
| Line 42: | Line 42: | ||
|- | |- | ||
|Profile [<sup>o</sup>] | |Profile [<sup>o</sup>] | ||
|Take a look at the | |Take a look at the images but be aware that the resist profile was not good to begin with. | ||
|- | |- | ||
|Images (click on the image to view a larger image) | |Images (click on the image to view a larger image) | ||