Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry: Difference between revisions

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|style="background:LightGrey; color:black"| Ion gun parameters
|style="background:LightGrey; color:black"| Ion gun parameters
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* Acceleration voltage, lens parameters  
* Acceleration voltage and focusing lens parameters  
* Gas inlet pressures, apertures,  
* Gas inlet pressures, apertures,  
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|style="background:LightGrey; color:black"| Mass spectrometer parameters
|style="background:LightGrey; color:black"| Mass spectrometer parameters
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Acceleration voltage, lens parameters
* Detector biases, range
* Gas inlet pressures, apertures,  
* Scan parameters such as raster size, speeds, pattern
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|style="background:LightGrey; color:black"| Sample position
|style="background:LightGrey; color:black"| Sample position
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|style="background:WhiteSmoke; color:black"|
* Acceleration voltage, lens parameters
* Angle towards spectrometer
* Gas inlet pressures, apertures,
* For non-conducting samples: Flood gun parameters
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!style="background:silver; color:black" align="left" rowspan="3" |Sample requirements
!style="background:silver; color:black" align="left" rowspan="3" |Sample requirements

Revision as of 13:44, 24 January 2014

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Atomika SIMS

Atomika SIMS: positioned in the basement of building 346 (underneath the cleanroom).


The Atomika SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined.

Please note that no user will be instructed on the SIMS. Danchip staff will run your samples.

The user manual(s) and technical information and contact information can be found in LabManager:

The Atomika SIMS in Labmanager

An overview of the performance of the SIMS

Purpose Determination of atomic composition
  • Doping level
  • Sample contamination
Performance Measurement accuracy depends on
  • Which atoms to be analysed
  • The sample morphology (flat samples are much more suited than particles)
Process parameters Ion gun parameters
  • Acceleration voltage and focusing lens parameters
  • Gas inlet pressures, apertures,
Mass spectrometer parameters
  • Detector biases, range
  • Scan parameters such as raster size, speeds, pattern
Sample position
  • Angle towards spectrometer
  • For non-conducting samples: Flood gun parameters
Sample requirements Substrate material allowed
  • In principle all materials
Substrate size
  • The samples must be cut into 5x5 or 7x7 mm pieces
  • Other types of samples must be mounted onto appropriately sized carriers
Batch size
  • The sample holder carries up to 6 samples at the time