Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry: Difference between revisions

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 |style="background:LightGrey; color:black"| Ion gun parameters
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-* Acceleration voltage, lens parameters
+* Acceleration voltage and focusing lens parameters
 * Gas inlet pressures, apertures,
 |-
 |style="background:LightGrey; color:black"| Mass spectrometer parameters
 |style="background:WhiteSmoke; color:black"|
-* Acceleration voltage, lens parameters
+* Detector biases, range
-* Gas inlet pressures, apertures,
+* Scan parameters such as raster size, speeds, pattern
 |-
 |style="background:LightGrey; color:black"| Sample position
 |style="background:WhiteSmoke; color:black"|
-* Acceleration voltage, lens parameters
+* Angle towards spectrometer
-* Gas inlet pressures, apertures,
+* For non-conducting samples: Flood gun parameters
 |-
 !style="background:silver; color:black" align="left" rowspan="3" |Sample requirements