Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions
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<gallery caption="Sample gallery" widths="300px" heights="300px" perrow="2"> | <gallery caption="Sample gallery" widths="300px" heights="300px" perrow="2"> | ||
Image:jmlshal070921 pos1 2mu_09.jpg|Standardization image of the profile of a 2 <math>\mu</math>m trench created by the shallolr recipe | |||
image:jmlshal070921 pos1 50mu_08.jpg|Standardization image of the profile of a 50 <math>\mu</math>m trench created by the shallolr recipe | |||
</gallery> | </gallery> | ||