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Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions

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<gallery caption="Sample gallery" widths="300px" heights="300px" perrow="2">
<gallery caption="Sample gallery" widths="300px" heights="300px" perrow="2">
[[Image:jmlshal070921 pos1 2mu_09.jpg|Standardization image of the profile of a 2 <math>\mu</math>m trench created by the shallolr recipe]]
Image:jmlshal070921 pos1 2mu_09.jpg|Standardization image of the profile of a 2 <math>\mu</math>m trench created by the shallolr recipe
[[image:jmlshal070921 pos1 50mu_08.jpg|Standardization image of the profile of a 50 <math>\mu</math>m trench created by the shallolr recipe]]
image:jmlshal070921 pos1 50mu_08.jpg|Standardization image of the profile of a 50 <math>\mu</math>m trench created by the shallolr recipe
</gallery>
</gallery>