Specific Process Knowledge/Thin film deposition/Deposition of Nickel: Difference between revisions
| Line 34: | Line 34: | ||
|10Å to 1µm | |10Å to 1µm | ||
|10Å to 1 µm | |10Å to 1 µm | ||
|10Å to 1000 Å | |||
|- | |- | ||
| Deposition rate | | Deposition rate | ||
|2Å/s to 15Å/s | |2Å/s to 15Å/s | ||
|10Å/s to 15Å/s | |10Å/s to 15Å/s | ||
|About 1Å/s | |||
|- | |- | ||
|} | |} | ||