Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300: Difference between revisions
No edit summary |
No edit summary |
||
| Line 1: | Line 1: | ||
==IBE/IBSD Ionfab 300: milling, dry etching and deposition in the same tool== | ==IBE/IBSD Ionfab 300: milling, dry etching and deposition in the same tool== | ||
[[Image:IBE_IBSD_udstyret_i_RR1.jpg|500x500px|thumb|IBE IBSD: positioned in cleanroom 1]] | |||
IBE: Ion Beam Etch | IBE: Ion Beam Etch | ||