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Specific Process Knowledge/Etch/DRIE-Pegasus/SOIetch: Difference between revisions

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Bureaucrats, danchip, Administrators
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Jml (talk | contribs)
Bureaucrats, danchip, Administrators
1,918 edits
No edit summary
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! Cycle time (secs)  
! Cycle time (secs)  
| 3.0
| 3.0
| .0
| 2.0
|-
|-
! Pressure (mtorr)  
! Pressure (mtorr)  
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