LabAdviser/Courses/TPT Thin Film: Difference between revisions
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===<b>Theoretical part</b>=== | ===<b>Theoretical part</b>=== | ||
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'''1<sup>st</sup> lecture (2 - 2½ hours):''' | |||
*Introduction to thin films | |||
**Thin film formation | |||
**Material properties | |||
**Overview of the techniques | |||
**LabAdviser | |||
*PVD (physical Vapour Deposition) | |||
**General notes on PVD | |||
**Resistive thermal evaporation | |||
**E-beam Evaporation | |||
**Sputtering | |||
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*Introduction to thin films | *Introduction to thin films | ||
*Before you start - Material properties to consider | *Before you start - Material properties to consider | ||
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*Equipment overview in LabAdviser | *Equipment overview in LabAdviser | ||
*Thin film techniques – 1<sup>st</sup> part: | *Thin film techniques – 1<sup>st</sup> part: | ||
**Thermal oxidation | **Thermal oxidation | ||
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<i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e. | <i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e. | ||
The next lecture will be held on the | The next lecture will be held on the 15th of February 2024 from 10-12. The lecture will be held in room 121A in building 345C. | ||
Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i> | Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i> | ||
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'''2<sup>nd</sup> lecture (3 - 3½ hours):''' | '''2<sup>nd</sup> lecture (3 - 3½ hours):''' | ||
*Thermal Oxidation | |||
*CVD (Chemical Vapour Deposition): | |||
**LPCVD (Low Pressure Chemical Vapour Deposition) | |||
**PECVD (Plasma Enhanced Chemical Vapour Deposition) | |||
*ALD (Atomic Layer Deposition) | |||
**Thermal ALD | |||
**Plasma Enhanced ALD | |||
*Comparison of thin film techniques | |||
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*Thin film techniques – 2<sup>nd</sup> part: | *Thin film techniques – 2<sup>nd</sup> part: | ||
**PVD (physical vapour deposition) | **PVD (physical vapour deposition) | ||
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***PECVD (plasma enhanced chemical vapour deposition) | ***PECVD (plasma enhanced chemical vapour deposition) | ||
**ALD (atomic layer deposition) | **ALD (atomic layer deposition) | ||
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<i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf | <i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf | ||
The next lecture will be held on the | The next lecture will be held on the 20th of February 2024 from 9-12. The lecture will be held in room 121C in building 345C. | ||
Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. | Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. | ||