LabAdviser/Courses/TPT Thin Film: Difference between revisions

Revision as of 08:42, 23 January 2024

Feedback to this page: click here

This page is written by DTU Nanolab internal

Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule	Theoretical part 1^st lecture (2 - 2½ hours): Introduction to thin films Thin film formation Material properties Overview of the techniques LabAdviser PVD (physical Vapour Deposition) General notes on PVD Resistive thermal evaporation E-beam Evaporation Sputtering Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e. The next lecture will be held on the 15th of February 2024 from 10-12. The lecture will be held in room 121A in building 345C. Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. 2^nd lecture (3 - 3½ hours): Thermal Oxidation CVD (Chemical Vapour Deposition): LPCVD (Low Pressure Chemical Vapour Deposition) PECVD (Plasma Enhanced Chemical Vapour Deposition) ALD (Atomic Layer Deposition) Thermal ALD Plasma Enhanced ALD Comparison of thin film techniques Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf The next lecture will be held on the 20th of February 2024 from 9-12. The lecture will be held in room 121C in building 345C. Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. Practical part None
Location	Theoretical part The locations for the lectures will be notified in the Doodles
Qualified prerequisites	None
Preparations	No preparation is required. However, a good overview of thin film processes can be found in Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (requires login). Links to more literature about thin films can be found below.
Course responsible	The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals	Be aware of relevant material properties for thin films made in the cleanroom Understand different thin film techniques Compare and be able to select appropriate thin film technique

Presentations from the lectures

Slides from the 1^st lecture

See LabManager (requires a login)

Slides from the 2^nd lecture

See LabManager (requires a login).

Literature

Some literature about thin films can be found here (requires a login):

Introduction to thin films

Thermal oxidation

S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation

@@ Line 21: / Line 21: @@
 |
 ===<b>Theoretical part</b>===
+<br>
+'''1<sup>st</sup> lecture (2 - 2½ hours):'''
-'''1<sup>st</sup> lecture (2 - 2½ hours):'''
+*Introduction to thin films
+**Thin film formation
+**Material properties
+**Overview of the techniques
+**LabAdviser
+*PVD (physical Vapour Deposition)
+**General notes on PVD
+**Resistive thermal evaporation
+**E-beam Evaporation
+**Sputtering
+<!--
 *Introduction to thin films
 *Before you start - Material properties to consider
@@ Line 29: / Line 41: @@
 *Equipment overview in LabAdviser
 *Thin film techniques – 1<sup>st</sup> part:
 **Thermal oxidation
+-->
 <i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.
-The next lecture will be held on the 10th of January 2024 from 10-12. The lecture will be held in building 358 room 039.
+The next lecture will be held on the 15th of February 2024 from 10-12. The lecture will be held in room 121A in building 345C.
 Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
@@ Line 42: / Line 55: @@
 '''2<sup>nd</sup> lecture (3 - 3½ hours):'''
+*Thermal Oxidation
+*CVD (Chemical Vapour Deposition):
+**LPCVD (Low Pressure Chemical Vapour Deposition)
+**PECVD (Plasma Enhanced Chemical Vapour Deposition)
+*ALD (Atomic Layer Deposition)
+**Thermal ALD
+**Plasma Enhanced ALD
+*Comparison of thin film techniques
+<!--
 *Thin film techniques – 2<sup>nd</sup>  part:
 **PVD (physical vapour deposition)
@@ Line 51: / Line 74: @@
 ***PECVD (plasma enhanced chemical vapour deposition)
 **ALD (atomic layer deposition)
+-->
 <i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf
-The next lecture will be held on the 15th of January 2024 from 9-12. The lecture will be held in building 358 room 039.
+The next lecture will be held on the 20th of February 2024 from 9-12. The lecture will be held in room 121C in building 345C.
 Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.

Revision as of 08:42, 23 January 2024

Thin Film TPT

Theoretical part

Practical part

Presentations from the lectures

Literature

Introduction to thin films

Thermal oxidation

Stress in thin films