Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch: Difference between revisions
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More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch | =More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch= | ||
Tests performed by MAria Farinha @DTU Nanolab | |||
Revision as of 13:49, 3 October 2023
More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch
Tests performed by MAria Farinha @DTU Nanolab