Jump to content

Specific Process Knowledge/Characterization/MicroSpectroPhotometer (Craic 20/30 PV): Difference between revisions

Eves (talk | contribs)
Eves (talk | contribs)
Line 154: Line 154:
|<p style="color:red;"><b>6</b></p>
|<p style="color:red;"><b>6</b></p>
|5.9
|5.9


|-
|-
Line 166: Line 165:


|-
|-
|style="background:WhiteSmoke; color:black"|<b>Power (W)</b>
|style="background:WhiteSmoke; color:black"|<b>Aperture Number</b>
|style="background:WhiteSmoke; color:black"|<b>Pressure (mTorr)</b>
|style="background:WhiteSmoke; color:black"|<b>Aperture Size (µm)</b>
|style="background:WhiteSmoke; color:black"|<b>Time (s)</b>
|style="background:WhiteSmoke; color:black"|<b>Numerical Aperture (N.A.)</b>
|style="background:WhiteSmoke; color:black"|<b>Total Thickness (nm)</b>
|style="background:WhiteSmoke; color:black"|<b>Working Distance (mm)</b>
|style="background:WhiteSmoke; color:black"|<b>Deposition rate (nm/s)</b>
|style="background:WhiteSmoke; color:black"|<b>Spectral range (nm)</b>
 
|-
|<p style="color:red;"><b>1</b></p>
|100.2
|style="background:WhiteSmoke;  align="center" rowspan="6" valign="center" color:black"|0.2
|style="background:WhiteSmoke;  align="center" rowspan="6" valign="center" color:black"|7.4 
|style="background:WhiteSmoke;  align="center" rowspan="6" valign="center" color:black"|220-2100


|-
|-
|500
|<p style="color:red;"><b>2</b></p>
|8
|75.3
|183
|94.2
|<p style="color:red;"><b>0.43</b></p>


|-
|-
|400
|<p style="color:red;"><b>3</b></p>
|8
|52.0
|228
|94.1
|<p style="color:red;"><b>0.33</b></p>


|-
|-
|300
|<p style="color:red;"><b>4</b></p>
|8
|25.0
|304
|93.53
|<p style="color:red;"><b>0.24</b></p>


|-
|-
|200
|<p style="color:red;"><b>5</b></p>
|8
|12.1
|456
|92.61
|<p style="color:red;"><b>0.15</b></p>


|-
|-
|100
|<p style="color:red;"><b>6</b></p>
|8
|5.9
|913
 
|89.99
|<p style="color:red;"><b>0.06</b></p>
|-
|-
|}
|}