Template:Spinning Track1: Difference between revisions
No edit summary |
No edit summary |
||
| Line 1: | Line 1: | ||
Track1 can be used to spin the standard thicknesses. You can use the recipes in the list below: | |||
*PR1_5 for 1,5 um resist thickness | *PR1_5 for 1,5 um resist thickness | ||
*PR2_2 for 2,2 um resist thickness | *PR2_2 for 2,2 um resist thickness | ||
Revision as of 13:32, 1 November 2007
Track1 can be used to spin the standard thicknesses. You can use the recipes in the list below:
- PR1_5 for 1,5 um resist thickness
- PR2_2 for 2,2 um resist thickness
- PR4_2 for 4,2 um resist thickness
If you want to see parameters for those spins please refer to this document: Parameters from Track1