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Specific Process Knowledge/Thin film deposition/Deposition of Palladium: Difference between revisions

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Palladium can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment:  
Palladium can be deposited by e-beam evaporation or DC sputtering.  
 
==Sputtering of Palladium==
 
Palladium may be sputter deposited in the sputter-system (Lesker). See process results here:
 
 
*[[/Pd sputtering in Sputter System (Lesker) |Pd sputtering in Sputter System (Lesker)]]
 
 
In the chart below you can compare the different deposition equipment:  




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