Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using AOE: Difference between revisions
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The AOE was upgraded in the spring 2010 and there has been a lot of problems with it since. It is running now but we still do not | The AOE was upgraded in the spring 2010 and there has been a lot of problems with it since. It is running now but we still do not have a very good recipe. Ask Berit (BGE) for the resent progress in process development. | ||
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Revision as of 12:55, 14 October 2010
The AOE was upgraded in the spring 2010 and there has been a lot of problems with it since. It is running now but we still do not have a very good recipe. Ask Berit (BGE) for the resent progress in process development.