Specific Process Knowledge/Etch/ICP Metal Etcher/Chromium: Difference between revisions
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==Chromium etch of hardmask for silicon nitride etching by Anders | ==Chromium etch of hardmask for silicon nitride etching by Anders Simonsen@nbi.ku== | ||
''Added by bghe@Nanolab'' | ''Added by bghe@Nanolab'' | ||
==Chromium etch in ICP metal on a thick glass substrate== | ==Chromium etch in ICP metal on a thick glass substrate== | ||