Template:DanchipInfo: Difference between revisions
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| style="background:silver; color:black" align="left"| '''E-beam training''' | | style="background:silver; color:black" align="left"| '''E-beam training''' | ||
|| [mailto:e-beam@nanolab.dtu.dk e-beam@nanolab.dtu.dk] | || [mailto:e-beam@nanolab.dtu.dk e-beam@nanolab.dtu.dk] | ||
|| To request training on JEOL JBX-9500FSZ or Raith | || To request training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. <br> Please study the material on [[Specific Process Knowledge/Lithography/EBeamLithography|the EBL Labadviser pages.]] | ||
|- | |- | ||
| style="background:LightGrey; color:black" align="left"| '''E-beam load''' | | style="background:LightGrey; color:black" align="left"| '''E-beam load''' |
Revision as of 13:58, 4 January 2024
In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab - Fabrication (formerly known as Danchip).
Mailbox | link | Concerning |
LabAdviser Mailbox | labadviser@nanolab.dtu.dk | Any questions or feedback to LabAdviser. |
Process flow review | process-flow@nanolab.dtu.dk (should work again) | More about process flow review here |
Training on equipment | training@nanolab.dtu.dk | It is our goal to answer your request regarding process flow reviews and training within 2 workdays. |
E-beam training | e-beam@nanolab.dtu.dk | To request training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. Please study the material on the EBL Labadviser pages. |
E-beam load | e-beamload@nanolab.dtu.dk | To request cassette loading on JEOL JBX-9500FSZ. |
Mask order: | Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering here. It requires a specification file like this: (example spec file) and a design file (gds or cif format). | |
Mask Review |
mask@nanolab.dtu.dk (Subject: Mask Review) | Note: You have to order masks at Compugraphics via Procure.
Nanolab can offer a check of the mask design and specifications. You can read more about mask design here. |
Metal wishes | . | . |
Lesker: |
metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes). | - See current and future materials here: Lesker status log |
Temescal/Wordentec: |
metal@nanolab.dtu.dk (Subject:PVD Metal Wishes) | See current and future materials here:
|
Tool change | toolchange@nanolab.dtu.dk | Laser: change of optics and Polymer Injection Molding machine: change mold-tool |
Commercial offers etc. | sales@nanolab.dtu.dk | mostly companies nanolabexternal customers |
Gas-related questions | DCH-Gas@nanolab.dtu.dk | issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use |
All other inquiries | nanolabsupport@nanolab.dtu.dk | ... or if you are in doubt |