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| == After installation of new SF6 MFC's ==
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| {{Template:Peg1RecipeTableVerCColors
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| |TableHeader=DREM 0.5 kW v2.3
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| }}
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| {{Template:Peg1RecipeTableVerCAddrowColors
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| |RecipeName=DREM 0.5kW v2.3
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| |PriorProcessSteps= Clamp Substrate,Pump to base, home platen matching unit, barc1, stab
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| |Keywords=
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| |PlatenPosition=U |PlatenFrequency=HF |StabilisationTime= |StartCycleEndCycle=D/E
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| |DepositionTime=3 |EtchTime='''2.5''' |NumberOfCycles=
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| |PressureDepDelay= |PressureDepBoost= |PressureDepMain=100%
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| |PressureEtchDelay= |PressureEtchBoost= |PressureEtchMain=100%
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| |C4F8DepDelay=0.3@5 |C4F8DepBoost= 0.5@10 |C4F8DepMain=45
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| |C4F8EtchDelay=0.3@25 |C4F8EtchBoost= |C4F8EtchMain=5
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| |SF6DepDelay=0.3@20 |SF6DepBoost=0.5@10 |SF6DepMain=10
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| |SF6EtchDelay=1.9@20 |SF6EtchBoost=0.5@30 |SF6EtchMain=30
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| |O2Dep= |O2Etch= |ArDep=75 |ArEtch=1.5@75,75
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| |WCoilDep=0.5 |WCoilEtch=0.5 |WPlatenDep=1
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| |WPlatenEtchDelay=0.9@1 |WPlatenEtchBoost=1@40 |WPlatenEtchMain=1
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| |WClaritasDep= |WClaritasEtch=
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| |%CoilDepLoad=45 |%CoilDepTune=50 |%CoilEtchLoad=45 |%CoilEtchTune=50
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| |%PlatenDepLoad=41 |%PlatenDepTune=60 |%PlatenEtchLoad=41 |%PlatenEtchTune=60
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| |Temperature=0
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| |Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3 | '''1''']]
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| }}
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| |}
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