Template:DanchipInfo: Difference between revisions
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| style="background:silver; color:black" align="left"| '''E-beam training''' | | style="background:silver; color:black" align="left"| '''E-beam training''' | ||
|| [mailto:e-beam@nanolab.dtu.dk e-beam | || [mailto:e-beam@nanolab.dtu.dk e-beam@nanolab.dtu.dk] | ||
|| To request training on JEOL JBX-9500FSZ or Raith ELPHY e-beam writer. <br> '''Authorization to run JEOL JBX-9500FSZ requires at least 4 training sessions. Before you request for training on this machine, study this page and have all files ready:''' [[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ#Getting_started|Getting started]]. | || To request training on JEOL JBX-9500FSZ or Raith ELPHY e-beam writer. <br> '''Authorization to run JEOL JBX-9500FSZ requires at least 4 training sessions. Before you request for training on this machine, study this page and have all files ready:''' [[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ#Getting_started|Getting started]]. | ||
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| style="background:LightGrey; color:black" align="left"|'''Mask order | | style="background:LightGrey; color:black" align="left"| '''E-beam load''' | ||
|| [mailto:e-beamload@nanolab.dtu.dk e-beamload@nanolab.dtu.dk] | |||
|| To request cassette loading on JEOL JBX-9500FSZ. | |||
|- | |||
| style="background:silver; color:black" align="left"|'''Mask order:''' | |||
|| | || | ||
|| Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering [[Specific_Process_Knowledge/Pattern_Design#Mask Ordering and Fabrication|here]]. It requires a specification file like this: ([[mask_spec|example spec file]]) and a design file (gds or cif format). | || Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering [[Specific_Process_Knowledge/Pattern_Design#Mask Ordering and Fabrication|here]]. It requires a specification file like this: ([[mask_spec|example spec file]]) and a design file (gds or cif format). | ||
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| style="background: | | style="background:LightGrey; color:black" align="left"| | ||
'''Mask Review''' | '''Mask Review''' | ||
|| [mailto:mask@nanolab.dtu.dk?Subject=Mask%20Review&body=Please%20review%20the%20attached%20mask. mask@nanolab.dtu.dk (Subject: Mask Review)] | || [mailto:mask@nanolab.dtu.dk?Subject=Mask%20Review&body=Please%20review%20the%20attached%20mask. mask@nanolab.dtu.dk (Subject: Mask Review)] | ||
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Nanolab can offer a check of the mask design and specifications. You can read more about mask design [[Specific_Process_Knowledge/Pattern_Design#Pattern Design and Mask Fabrication|here]]. | Nanolab can offer a check of the mask design and specifications. You can read more about mask design [[Specific_Process_Knowledge/Pattern_Design#Pattern Design and Mask Fabrication|here]]. | ||
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| style="background: | | style="background:Silver; color:black" align="left" | '''Metal wishes''' | ||
| style="background:WhiteSmoke; color:black" | . | | style="background:WhiteSmoke; color:black" | . | ||
| style="background:WhiteSmoke; color:black" | . | | style="background:WhiteSmoke; color:black" | . | ||
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| style="background: | | style="background:LightGrey; color:black" align="left"| | ||
'''Lesker:''' | '''Lesker:''' | ||
| style="background:WhiteSmoke; color:black" | [mailto:metal@nanolab.dtu.dk?Subject=Lesker%20Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20the%20Lesker%20from%20the%20period%20starting%20on%20Thursday%20DD%20MMM%20YYYY: metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes)]. | | style="background:WhiteSmoke; color:black" | [mailto:metal@nanolab.dtu.dk?Subject=Lesker%20Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20the%20Lesker%20from%20the%20period%20starting%20on%20Thursday%20DD%20MMM%20YYYY: metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes)]. | ||
| style="background:WhiteSmoke; color:black" | - See current and future materials here: [http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=244&type=status Lesker status log] | | style="background:WhiteSmoke; color:black" | - See current and future materials here: [http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=244&type=status Lesker status log] | ||
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| style="background: | | style="background:Silver; color:black" align="left"| | ||
'''Temescal/Wordentec/Physimeca:''' | '''Temescal/Wordentec/Physimeca:''' | ||
| style="background:WhiteSmoke; color:black" | [mailto:pvd@nanolab.dtu.dk?Subject=Temescal/Wordentec/Physimeca%20Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20%0A%0DThe%20Temescal%20from%20the%20period%20starting%20on%20Monday%20DD%20MMM%20YYYY:%0A%0DThe%20Wordentec%20from%20the%20period%20starting%20on%20Tuesday/Friday%20DD%20MMM%20YYYY:%0A%0DThe%20Physimeca%20from%20the%20period%20starting%20on%20Wednessday%20DD%20MMM%20YYYY: metal@nanolab.dtu.dk (Subject:PVD Metal Wishes)] | | style="background:WhiteSmoke; color:black" | [mailto:pvd@nanolab.dtu.dk?Subject=Temescal/Wordentec/Physimeca%20Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20%0A%0DThe%20Temescal%20from%20the%20period%20starting%20on%20Monday%20DD%20MMM%20YYYY:%0A%0DThe%20Wordentec%20from%20the%20period%20starting%20on%20Tuesday/Friday%20DD%20MMM%20YYYY:%0A%0DThe%20Physimeca%20from%20the%20period%20starting%20on%20Wednessday%20DD%20MMM%20YYYY: metal@nanolab.dtu.dk (Subject:PVD Metal Wishes)] | ||
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* For Wordentec you need to contact the thin film group. | * For Wordentec you need to contact the thin film group. | ||
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| style="background: | | style="background:LightGrey; color:black" align="left"| '''Tool change''' | ||
| style="background:WhiteSmoke; color:black" | [mailto:toolchange@nanolab.dtu.dk toolchange@nanolab.dtu.dk] | | style="background:WhiteSmoke; color:black" | [mailto:toolchange@nanolab.dtu.dk toolchange@nanolab.dtu.dk] | ||
| style="background:WhiteSmoke; color:black" | Laser: change of optics and <br /> Polymer Injection Molding machine: change mold-tool | | style="background:WhiteSmoke; color:black" | Laser: change of optics and <br /> Polymer Injection Molding machine: change mold-tool | ||
|- | |- | ||
| style="background: | | style="background:SIlver; color:black" align="left"| '''Commercial offers etc.''' | ||
||[mailto:sales@nanolab.dtu.dk sales@nanolab.dtu.dk] | ||[mailto:sales@nanolab.dtu.dk sales@nanolab.dtu.dk] | ||
||mostly companies nanolabexternal customers | ||mostly companies nanolabexternal customers | ||
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| style="background: | | style="background:LightGrey; color:black" align="left"| '''Gas-related questions''' | ||
| style="background:WhiteSmoke; color:black" | [mailto:DCH-Gas@nanolab.dtu.dk DCH-Gas@nanolab.dtu.dk] | | style="background:WhiteSmoke; color:black" | [mailto:DCH-Gas@nanolab.dtu.dk DCH-Gas@nanolab.dtu.dk] | ||
| style="background:WhiteSmoke; color:black" | issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use | | style="background:WhiteSmoke; color:black" | issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use | ||
|- | |- | ||
| style="background: | | style="background:Silver; color:black" align="left"| '''All other inquiries''' | ||
|| [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk] | || [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk] | ||
|| ... or if you are in doubt | || ... or if you are in doubt | ||
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|} | |} | ||
Revision as of 10:01, 3 December 2020
In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab - Fabrication (formerly known as Danchip).
| Mailbox | link | Concerning |
| LabAdviser Mailbox | labadviser@nanolab.dtu.dk | Any questions or feedback to LabAdviser. |
| Process flow review | process-flow@nanolab.dtu.dk (should work again) | More about process flow review here |
| Training on equipment | training@nanolab.dtu.dk | It is our goal to answer your request regarding process flow reviews and training within 2 workdays. |
| E-beam training | e-beam@nanolab.dtu.dk | To request training on JEOL JBX-9500FSZ or Raith ELPHY e-beam writer. Authorization to run JEOL JBX-9500FSZ requires at least 4 training sessions. Before you request for training on this machine, study this page and have all files ready: Getting started. |
| E-beam load | e-beamload@nanolab.dtu.dk | To request cassette loading on JEOL JBX-9500FSZ. |
| Mask order: | Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering here. It requires a specification file like this: (example spec file) and a design file (gds or cif format). | |
|
Mask Review |
mask@nanolab.dtu.dk (Subject: Mask Review) | Note: You have to order masks at Compugraphics via Procure.
Nanolab can offer a check of the mask design and specifications. You can read more about mask design here. |
| Metal wishes | . | . |
|
Lesker: |
metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes). | - See current and future materials here: Lesker status log |
|
Temescal/Wordentec/Physimeca: |
metal@nanolab.dtu.dk (Subject:PVD Metal Wishes) | See current and future materials here: |
| Tool change | toolchange@nanolab.dtu.dk | Laser: change of optics and Polymer Injection Molding machine: change mold-tool |
| Commercial offers etc. | sales@nanolab.dtu.dk | mostly companies nanolabexternal customers |
| Gas-related questions | DCH-Gas@nanolab.dtu.dk | issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use |
| All other inquiries | nanolabsupport@nanolab.dtu.dk | ... or if you are in doubt |