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Specific Process Knowledge/Thin film deposition/Deposition of AZO: Difference between revisions

Reet (talk | contribs)
added new sputter equipment
Paphol (talk | contribs)
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*Many smaller samples  
*Many smaller samples  
*Up to 10x4" or 6" wafers
*Up to 10x4" or 6" wafers (Cassette load in the LL)
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*Pieces or  
*Pieces or