Specific Process Knowledge/Thin film deposition/Deposition of AZO: Difference between revisions
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added new sputter equipment |
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*Many smaller samples | *Many smaller samples | ||
*Up to 10x4" or 6" wafers | *Up to 10x4" or 6" wafers (Cassette load in the LL) | ||
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*Pieces or | *Pieces or | ||