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Specific Process Knowledge/Thin film deposition/Deposition of ITO: Difference between revisions

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!Generel description
!Generel description
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*RF sputtering of an ITO target
*RF sputtering of an ITO target - reactive sputtering possible
*Reactive RF or DC sputtering of an ITO target
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*RF sputtering of an ITO target - reactive sputtering possible
*RF sputtering of an ITO target - reactive sputtering possible
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