Specific Process Knowledge/Thermal Process/Pyrolysis/Pyrolysis with Multipurpose Anneal Furnace

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Pyrolysis Recipes

Because the properties of the final carbon are largely depending on the pyrolysis process as well as the polymer precusors, each parameter has a different influence. By modifying those parameters, the properties of pyrolytic carbon can be tailored. The number of steps, the maximum temperature of each step, the heating rate, the dwell time at the maximum temperature and the gas composition inside the furnace are the parameters that can be changed to control the properties of pyrolytic carbon. At DTU Nanolab, the polymer precusor mostly is SU-8 negative photoresist and high temperature 3D printing resin. Depend on the designed properties of pyrolytic carbon material, pyrolysis process will be optimized.

Optimized Recipe for the conductivity of pyrolytic carbon

For using pyrolytic carbon as a working electrode for electrochemical sensor, the conductivity of the pyrolytic carbon must be maximized. The main goal of this recipe is to obtain the carbon material with highest conductivity as possible. The conductivity is measured by probe station with 4 points probe method.

Recipe: ""

Parameter	Value
Precusor	SU-8
Number of step	1
Final Temperature	1100oC
Ramping Rate	2oC per minute
Annealing time at final temperature	6 hours
Gas	20 sccm N2

Optimized Recipe for the stress of pyrolytic carbon

Recipe for maximize the tensile stress of pyrolytic carbon material. The stress is measured by the DektakXTA by thin film stress method.

Recipe: "Long_optimized"

Parameter	Value
Precusor	SU-8
Number of step	2
First step Temperature	200oC
First step Anneal time	30 minutes
First step Ramping Rate	2oC per minute
Final temperature	700oC
Ramping rate to final temperature	30oC per minute
Annealing time at final temperature	10 minutes
Gas	20 sccm N2