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| ==Equipment performance and process related parameters==
| | The Cleaver: Lattice Axe is designed for cleaving wafers into smaller pieces. The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: lattice axe should always be placed inside Fume hood 5. |
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| {| border="2" cellspacing="0" cellpadding="2"
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| !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
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| |style="background:WhiteSmoke; color:black"|<b>Wafer scriber</b>
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| !style="background:silver; color:black;" align="center" width="60"|Purpose
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| |style="background:LightGrey; color:black"|Cleaving samples in smaller pieces
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| |style="background:WhiteSmoke; color:black"|
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| !style="background:silver; color:black" align="center" valign="center" rowspan="1"|Performance
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| |style="background:LightGrey; color:black"|Scribe lines
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| |style="background:WhiteSmoke; color:black"| Lines can be made perpendicular to each other by turning chuck 90°
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| !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range
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| |style="background:LightGrey; color:black"|Wafer thickness
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| |style="background:WhiteSmoke; color:black"| Adjustable by increasing or decreasing the load of the diamond pen
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| |style="background:LightGrey; color:black"|Distance between scribe lines
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| |style="background:WhiteSmoke; color:black"| Approx. 5 mm
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| !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates
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| |style="background:LightGrey; color:black"| Size of Substrate
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| |style="background:WhiteSmoke; color:black"| Up to 100 mm wafers
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| |style="background:LightGrey; color:black"|Allowed materials
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| |style="background:WhiteSmoke; color:black"| All but only Si where the scribe lines are made
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| |}
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The Cleaver: Lattice Axe is designed for cleaving wafers into smaller pieces. The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: lattice axe should always be placed inside Fume hood 5.
