Specific Process Knowledge/Thin film deposition/Deposition of NiFe: Difference between revisions
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=Deposition of NiFe alloy= | =Deposition of NiFe alloy= | ||
NiFe has been deposited in the [[Specific_Process_Knowledge/Thin_film_deposition/Lesker|Sputter System (Lesker)]] here at Nanolab. Below you will find some results of varying the deposition parameters. You can find more information on the process parameters used by others in the [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&machid=244 Process Log] in LabManager. | NiFe has been deposited in the [[Specific_Process_Knowledge/Thin_film_deposition/Lesker|Sputter System (Lesker)]] here at Nanolab. Below you will find some results of varying the deposition parameters in that particular setup. You can find more information on the process parameters used by others in the [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&machid=244 Process Log] in LabManager. | ||
==Film quality optimization== | ==Film quality optimization== | ||