Template:DanchipInfo: Difference between revisions
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|| To request training on JEOL JBX-9500FSZ or Raith ELPHY e-beam writer. <br> '''Authorization to run JEOL JBX-9500FSZ requires at least 4 training sessions. Before you request for training on this machine, study this page and have all files ready:''' [[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ#Getting_started|Getting started]]. | || To request training on JEOL JBX-9500FSZ or Raith ELPHY e-beam writer. <br> '''Authorization to run JEOL JBX-9500FSZ requires at least 4 training sessions. Before you request for training on this machine, study this page and have all files ready:''' [[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ#Getting_started|Getting started]]. | ||
|- | |- | ||
| style="background: | | style="background:LightGrey; color:black" align="left"|'''Mask order/review:''' | ||
|| More about mask design [[Specific_Process_Knowledge/Lithography/Pattern_Design_and_Mask_Fabrication|here]] | || More about mask design [[Specific_Process_Knowledge/Lithography/Pattern_Design_and_Mask_Fabrication|here]] | ||
|| . | || . | ||
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| style="background:silver; color:black" align="left"| | | style="background:silver; color:black" align="left"| | ||
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| style="background:WhiteSmoke; color:black" | . | | style="background:WhiteSmoke; color:black" | . | ||
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| style="background: | | style="background:Silver; color:black" align="left"| '''Tool change''' | ||
| style="background:WhiteSmoke; color:black" | [mailto:toolchange@danchip.dtu.dk toolchange@danchip.dtu.dk] | | style="background:WhiteSmoke; color:black" | [mailto:toolchange@danchip.dtu.dk toolchange@danchip.dtu.dk] | ||
| style="background:WhiteSmoke; color:black" | Laser: change of optics and <br /> Polymer Injection Molding machine: change mold-tool | | style="background:WhiteSmoke; color:black" | Laser: change of optics and <br /> Polymer Injection Molding machine: change mold-tool | ||
|- | |- | ||
| style="background: | | style="background:LightGrey; color:black" align="left"| '''Commercial offers etc.''' | ||
||[mailto:sales@danchip.dtu.dk sales@danchip.dtu.dk] | ||[mailto:sales@danchip.dtu.dk sales@danchip.dtu.dk] | ||
||mostly companies and external customers | ||mostly companies and external customers | ||
|- | |- | ||
| style="background: | | style="background:Silver; color:black" align="left"| '''Gas-related questions''' | ||
| style="background:WhiteSmoke; color:black" | [mailto:DCH-Gas@danchip.dtu.dk DCH-Gas@danchip.dtu.dk] | | style="background:WhiteSmoke; color:black" | [mailto:DCH-Gas@danchip.dtu.dk DCH-Gas@danchip.dtu.dk] | ||
| style="background:WhiteSmoke; color:black" | issues (information regarding ordering, delivery, changing etc. Mostly for internal Danchip use | | style="background:WhiteSmoke; color:black" | issues (information regarding ordering, delivery, changing etc. Mostly for internal Danchip use | ||
|- | |- | ||
| style="background: | | style="background:LightGrey; color:black" align="left"| '''All other inquiries''' | ||
|| [mailto:danchipsupport@danchip.dtu.dk danchipsupport@danchip.dtu.dk] | || [mailto:danchipsupport@danchip.dtu.dk danchipsupport@danchip.dtu.dk] | ||
|| ... or if you are in doubt | || ... or if you are in doubt | ||
|- | |- | ||
|} | |} |
Revision as of 10:43, 12 July 2019
In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab - Fabrication (formerly known as Danchip).
Mailbox | link | Concerning |
LabAdviser Mailbox | labadviser@danchip.dtu.dk | Any questions or feedback to LabAdviser. |
Process flow review | process_flow@danchip.dtu.dk (should work again) | More about process flow review here |
Training on equipment | training@danchip.dtu.dk | It is our goal to answer your request regarding process flow reviews and training within 2 workdays. |
E-beam training | e-beam@danchip.dtu.dk e-beamload@danchip.dtu.dk |
To request training on JEOL JBX-9500FSZ or Raith ELPHY e-beam writer. Authorization to run JEOL JBX-9500FSZ requires at least 4 training sessions. Before you request for training on this machine, study this page and have all files ready: Getting started. |
Mask order/review: | More about mask design here | . |
Mask Review |
mask@nanolab.dtu.dk (Subject: Mask Review) | Note: You have to order masks at Compugraphics via Procure. Nanolab can offer a check of the mask design and specifications. Minimal feature: 0.8µm, 1.0µm or 1.5µm.
Requires a specification file like this: (example spec file). . |
Metal wishes | . | . |
Lesker: |
metal@danchip.dtu.dk (Subject: Lesker Metal Wishes). | - See current and future materials here: Lesker status log |
Temescal/Wordentec/Physimeca: |
metal@danchip.dtu.dk (Subject:PVD Metal Wishes) | . |
Tool change | toolchange@danchip.dtu.dk | Laser: change of optics and Polymer Injection Molding machine: change mold-tool |
Commercial offers etc. | sales@danchip.dtu.dk | mostly companies and external customers |
Gas-related questions | DCH-Gas@danchip.dtu.dk | issues (information regarding ordering, delivery, changing etc. Mostly for internal Danchip use |
All other inquiries | danchipsupport@danchip.dtu.dk | ... or if you are in doubt |