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[[Image:FEG.jpg|300x300px|right|thumb| DTU Nanolabs QFEG positioned in building 314 room no. 010]]
 
 
The FEI QFEG 200 Cryo ESEM FEG is a field emission
scanning electron microscope with a spatial resolution of 2 nm for the ETD detector in high vacuum at 30 keV. The microscope can operate in several modes, such as high vacuum, low vacuum, environmental mode, room temperature, low temperature and cryo. Our QFEG is fitted with an EDS detector, which allows for analytical measurements in all the operation modes. With the cryo transfer system available, it is especially suited for cryo experiments.
 
== Process information ==
 
*'''Electron source'''
Field emission gun
*'''Accelerating voltage'''
500 V- 30 kV
*'''Resolution'''
2 nm at 30 kV (SE)
*'''Imaging detectors'''
Everhart-Thornley (SE/BSE), Solid State BSE, Large Field, Gaseous SE, Gaseous BSE, Gaseous Analytical, STEM, vCD and CCD Camera
*'''Imaging modes'''
High, low vacuum and environmental
*'''Analytical capabilities'''
Energy dispersive X-rays (Oxford Instruments 80 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)
*'''Attachments'''
Quorum PP2000 Cryo System, FEI Peltier stage (-10°C to 22°C).
 
==Equipment performance and process related parameters==
{| border="2" cellspacing="0" cellpadding="0"
!colspan="2" border="none" style="background:silver; color:black;" align="center |Equipment
|style="background:WhiteSmoke; color:black" align="center"|FEI QFEG 200 Cryo ESEM
|-
!style="background:silver; color:black;" align="center" width="60"| Purpose
|style="background:LightGrey; color:black" "rowspan="2"| Vizualization and Microanalysis
|style="background:WhiteSmoke; color:black"|
* Vizualization of surfaces (topography and Z contrast)
* Vizualization of projected image (BF STEM image)
* Energy Dispersive X-ray analysis
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
|style="background:LightGrey; color:black" rowspan="2"|Resolution
|style="background:Whitesmoke; color:black" colspan="1" align="left"|The resolution of QFEG dependends on the sample and the operation mode!
|-
|style="background:WhiteSmoke; color:black"|
* 2 nm at 30 keV for Au on C sample with the ETD detector
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="7"|Instrument specifics
|style="background:LightGrey; color:black"|Detectors
|style="background:WhiteSmoke; color:black"|
* ETD- Everhart-Thornley for secondary electrons
* BSD- Solid state Back Scattered Detector
* LFD- Large Field Detector for secondary electrons
* GSED- Gaseous Secondary Electron Detector
* GBSD- Gaseous Backscattered Electron Detector
* GAD- Gaseous Analystical Detector
* STEM- right field Scanning Tramission Electron detector
* vCD- low voltage BSED
* CCD camera
|-
|style="background:LightGrey; color:black"|Electron source
|style="background:WhiteSmoke; color:black"|
* Field Emission - Tungsten filament
|-
|style="background:LightGrey; color:black"|Stage (room temperature)
|style="background:WhiteSmoke; color:black"|
* X, Y: 25 &times; 25 mm
* T: 0 to 60<sup>o</sup> (Full tilt require removment of cryo cold trap.)
* R: 360<sup>o</sup>
|-
|style="background:LightGrey; color:black"|Peltier stage
|style="background:WhiteSmoke; color:black"|
* FEI Peltier stage -10<sup>o</sup> to 22<sup>o</sup>
|-
|style="background:LightGrey; color:black"|Cryo stage
|style="background:WhiteSmoke; color:black"|
* Quorum PP2000 Cryo System
|-
|style="background:LightGrey; color:black"|EDS
|style="background:WhiteSmoke; color:black"|
* Oxford Instruments 80 mm<sup>2</sup> X-Max silicon drift detector, MnKα resolution at 124 eV
|-
|style="background:LightGrey; color:black"|Operating pressures
|style="background:WhiteSmoke; color:black"|
* High vacuum (10<sup>-4</sup> Pa), Low vacuum and Enviromental mode (up to 2700Pa)
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
|style="background:LightGrey; color:black"|Sample sizes
|style="background:WhiteSmoke; color:black"|
* No actual limit (limitted by stage movment and detector position).
|-
| style="background:LightGrey; color:black"|Allowed materials
|style="background:WhiteSmoke; color:black"|
* Conductors, Semiconductors,Insulators,Wet Samples, Biological (not pathogents!)
|-
|}

Revision as of 08:54, 16 March 2020

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DTU Nanolabs QFEG positioned in building 314 room no. 010


The FEI QFEG 200 Cryo ESEM FEG is a field emission scanning electron microscope with a spatial resolution of 2 nm for the ETD detector in high vacuum at 30 keV. The microscope can operate in several modes, such as high vacuum, low vacuum, environmental mode, room temperature, low temperature and cryo. Our QFEG is fitted with an EDS detector, which allows for analytical measurements in all the operation modes. With the cryo transfer system available, it is especially suited for cryo experiments.

Process information

  • Electron source

Field emission gun

  • Accelerating voltage

500 V- 30 kV

  • Resolution

2 nm at 30 kV (SE)

  • Imaging detectors

Everhart-Thornley (SE/BSE), Solid State BSE, Large Field, Gaseous SE, Gaseous BSE, Gaseous Analytical, STEM, vCD and CCD Camera

  • Imaging modes

High, low vacuum and environmental

  • Analytical capabilities

Energy dispersive X-rays (Oxford Instruments 80 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)

  • Attachments

Quorum PP2000 Cryo System, FEI Peltier stage (-10°C to 22°C).

Equipment performance and process related parameters

Equipment FEI QFEG 200 Cryo ESEM
Purpose Vizualization and Microanalysis
  • Vizualization of surfaces (topography and Z contrast)
  • Vizualization of projected image (BF STEM image)
  • Energy Dispersive X-ray analysis
Performance Resolution The resolution of QFEG dependends on the sample and the operation mode!
  • 2 nm at 30 keV for Au on C sample with the ETD detector
Instrument specifics Detectors
  • ETD- Everhart-Thornley for secondary electrons
  • BSD- Solid state Back Scattered Detector
  • LFD- Large Field Detector for secondary electrons
  • GSED- Gaseous Secondary Electron Detector
  • GBSD- Gaseous Backscattered Electron Detector
  • GAD- Gaseous Analystical Detector
  • STEM- right field Scanning Tramission Electron detector
  • vCD- low voltage BSED
  • CCD camera
Electron source
  • Field Emission - Tungsten filament
Stage (room temperature)
  • X, Y: 25 × 25 mm
  • T: 0 to 60o (Full tilt require removment of cryo cold trap.)
  • R: 360o
Peltier stage
  • FEI Peltier stage -10o to 22o
Cryo stage
  • Quorum PP2000 Cryo System
EDS
  • Oxford Instruments 80 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV
Operating pressures
  • High vacuum (10-4 Pa), Low vacuum and Enviromental mode (up to 2700Pa)
Substrates Sample sizes
  • No actual limit (limitted by stage movment and detector position).
Allowed materials
  • Conductors, Semiconductors,Insulators,Wet Samples, Biological (not pathogents!)
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