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Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions

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==Comparison of roughness and other surface characteristics for different methods of Aluminium deposition==
==Comparison of roughness and other surface characteristics for different methods of Aluminium deposition==


Studies by AFM was performed to examine differences in characteristics of the Al films, deposited with the differnt methods (sputter, e-beam, thermal). See details of the study [[/Comparison of roughness and other surface characteristics for different methods of Aluminium deposition|here]].
A study by AFM was performed to examine the Al films deposited with thermal evaporation. See details of the study [[/Comparison of roughness and other surface characteristics for different methods of Aluminium deposition|here]].