Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey: Difference between revisions
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[[File:ALD-Sandwich-29a.jpg|700px]] | [[File:ALD-Sandwich-29a.jpg|700px]] | ||
As seen above there is only a very small amount of Ti2p. Why is this? Let us zoom in onto the Ti2p peak and see how the fitting goes. | As seen above there is only a very small amount of Ti2p and at the same time the O1s is much too high. Why is this? Let us zoom in onto the Ti2p peak and see how the fitting goes. | ||
[[File:ALD sandwich Ti survey.gif|630px]] | [[File:ALD sandwich Ti survey.gif|630px]] | ||
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In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum. | In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum. | ||
Judging by the way the background is fitted, it looks as if the software is programmed to fit the background below only the Ti2p<sub>3/2</sub> peak. separate peaks of | |||