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Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum: Difference between revisions

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== Molybdenum deposition ==
== Molybdenum deposition ==
Molybdenum can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment.  
Molybdenum can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment.  


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