Specific Process Knowledge/Etch: Difference between revisions
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== Choose a dry etch equipment == | == Choose a dry etch equipment == | ||
*[[RIE (Reactive Ion Etch)]] | *[[/RIE (Reactive Ion Etch)|RIE (Reactive Ion Etch)]] | ||
*[[ASE (Advanced Silicon Etch)]] | *[[/ASE (Advanced Silicon Etch)|ASE (Advanced Silicon Etch)]] | ||
*[[AOE (Advanced Oxide Etch)]] | *[[/AOE (Advanced Oxide Etch)|AOE (Advanced Oxide Etch)]] | ||
== Choose a wet etch == | == Choose a wet etch == | ||