Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AZO deposition using ALD: Difference between revisions
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=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]= | =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]= | ||
EtZn<sub>2</sub>O = DEZ | |||
<b>Recipe: AZO 20T</b> | |||
<b>Maximum deposition thickness: xx nm</b> | |||
<b>Temperature: x <sup>o</sup>C - xx <sup>o</sup>C</b> | |||
{| border="2" cellspacing="2" cellpadding="9" align="none" | {| border="2" cellspacing="2" cellpadding="9" align="none" | ||
|- | |- | ||
| | !# macrocycles | ||
! | |colspan="8" align="center"|1 | ||
! | |- | ||
!# cycles | |||
|colspan="4" align="center"|20 | |||
|colspan="4" align="center"|1 | |||
|- | |||
!Precursor | |||
!DEZ | |||
!DEZ | |||
!H<sub>2</sub>O | !H<sub>2</sub>O | ||
!H<sub>2</sub>O | !H<sub>2</sub>O | ||
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|20.0 s | |20.0 s | ||
|- | |- | ||
|} | |} | ||
<b>How to fill out the process log in LabManager:</b> | |||
The pulse time for each precursor equals the total pulse time times the number of cycles in each macroscycle. | |||
DEZ pulse time: (0.1 + 0.1) s * 20 = 4 s | |||
TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s | |||
H<sub>2</sub>O pulse time: [(0.1 + 0.1) s * 20] + [ (0.1 + 0.1) s * 1] 4.2 s |
Revision as of 17:30, 9 January 2017
THIS PAGE IS UNDER CONSTRUCTION![Under construction.png](/images/thumb/f/f8/Under_construction.png/200px-Under_construction.png.jpeg)
EtZn2O = DEZ
Recipe: AZO 20T
Maximum deposition thickness: xx nm
Temperature: x oC - xx oC
# macrocycles | 1 | |||||||
---|---|---|---|---|---|---|---|---|
# cycles | 20 | 1 | ||||||
Precursor | DEZ | DEZ | H2O | H2O | TMA | TMA | H2O | H2O |
Nitrogen flow | 200 sccm | 200 sccm | 150 sccm | 150 sccm | 200 sccm | 200 sccm | ||
Pulse time | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s |
Purge time | 0.5 s | 20.0 s | 0.5 s | 20.0 s | 0.5 s | 20.0 s | 0.5 s | 20.0 s |
How to fill out the process log in LabManager:
The pulse time for each precursor equals the total pulse time times the number of cycles in each macroscycle.
DEZ pulse time: (0.1 + 0.1) s * 20 = 4 s TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s H2O pulse time: [(0.1 + 0.1) s * 20] + [ (0.1 + 0.1) s * 1] 4.2 s