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| | align="center" valign="top"|
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| {| border="2" cellspacing="2" cellpadding="3" align="center" style="width:750px"
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| ! colspan="5" |Deposition conditions at 150 <sup>o</sup>C
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| |-
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| !Number of cycles
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| |<b>Thickness (nm)</b>
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| |<b>Uniformity across 100mm Si substrate (%)</b>
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| |<b>Standard deviation error</b>
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| |<b>Refractive index @ 632.8 nm</b>
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|
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| |-
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| |150
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| |15.38
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| |1.72
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| |0.18
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| |1.61
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|
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| |-
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| |300
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| |28.67
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| |1.73
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| |0.36
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| |1.62
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|
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| |-
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| |500
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| |46.93
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| |1.75
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| |0.57
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| |1.62
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|
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| |-
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| |800
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| |73.46
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| |1.75
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| |0.92
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| |1.63
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|
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| |-
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| |1088
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| |99.50
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| |1.74
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| |1.20
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| |1.63
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|
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| |-
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| |}
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| |- | | |- |
| |} | | |} |
