Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions
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Deposition rate: <b>0.089 nm/cycle </b>(@120 <sup>o</sup>C) | Deposition rate: <b>0.089 nm/cycle </b>(@120 <sup>o</sup>C) | ||
{| border="2" cellspacing="2" cellpadding="3" colspan="10" | |||
|bgcolor="#98FB98" |'''Al<sub>2</sub>O<sub>3</sub> deposition at 100 <sup>o</sup>C and 150 <sup>o</sup>C''' | |||
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| | |||
{| {{table}} | |||
| align="center" | | |||
{| border="2" cellspacing="2" cellpadding="3" align="center" style="width:750px" | |||
! colspan="5" |Deposition conditions at 100 <sup>o</sup>C | |||
|- | |||
!Number of cycles | |||
|<b>Thickness (nm)</b> | |||
|<b>Uniformity across 100mm Si substrate (%)</b> | |||
|<b>Standard deviation error</b> | |||
|<b>Refractive index @ 632.8 nm</b> | |||
|- | |||
|150 | |||
|14.11 | |||
|2.18 | |||
|0.225 | |||
|1.56 | |||
|- | |||
|300 | |||
|25.94 | |||
|0.68 | |||
|0.14 | |||
|1.59 | |||
|- | |||
|500 | |||
|41.35 | |||
|1.87 | |||
|0.60 | |||
|1.59 | |||
|- | |||
|800 | |||
|65.05 | |||
|2.28 | |||
|1.13 | |||
|1.59 | |||
|- | |||
|1088 | |||
|87.25 | |||
|2.15 | |||
|1.35 | |||
|1.60 | |||
|- | |||
|} | |||
| align="center" valign="top"| | |||
{| border="2" cellspacing="2" cellpadding="3" align="center" style="width:750px" | |||
! colspan="5" |Deposition conditions at 150 <sup>o</sup>C | |||
|- | |||
!Number of cycles | |||
|<b>Thickness (nm)</b> | |||
|<b>Uniformity across 100mm Si substrate (%)</b> | |||
|<b>Standard deviation error</b> | |||
|<b>Refractive index @ 632.8 nm</b> | |||
|- | |||
|150 | |||
|15.38 | |||
|1.72 | |||
|0.18 | |||
|1.61 | |||
|- | |||
|300 | |||
|28.67 | |||
|1.73 | |||
|0.36 | |||
|1.62 | |||
|- | |||
|500 | |||
|46.93 | |||
|1.75 | |||
|0.57 | |||
|1.62 | |||
|- | |||
|800 | |||
|73.46 | |||
|1.75 | |||
|0.92 | |||
|1.63 | |||
|- | |||
|1088 | |||
|99.50 | |||
|1.74 | |||
|1.20 | |||
|1.63 | |||
|- | |||
|} | |||
|- | |||
|} | |||
|} | |||
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==Low temperature deposition of TiO<sub>2</sub>== | ==Low temperature deposition of TiO<sub>2</sub>== | ||