Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions
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==Low temperature deposition of TiO<sub>2</sub>== | ==Low temperature deposition of TiO<sub>2</sub>== | ||
<b | <b>Recipe: TiO2LT</b> | ||
<b | <b>Temperature: 80-150 <sup>o</sup>C</b> | ||
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