Template:DanchipInfo: Difference between revisions
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| style="background:silver; color:black" align="left"| '''E-beam training''' | | style="background:silver; color:black" align="left"| '''E-beam training''' | ||
|| [mailto:e-beam@danchip.dtu.dk e-beam@danchip.dtu.dk] | || [mailto:e-beam@danchip.dtu.dk e-beam@danchip.dtu.dk] | ||
|| To request training on JEOL JBX-9500FSZ or Raith ELPHY e-beam writer. '''Authorization to run JEOL JBX-9500FSZ requires at least 5 training sessions.<br> Before you request for training, study this page and have all files ready:''' [[Specific_Process_Knowledge/Lithography/EBeamLithography#Getting_started|Getting started]]. | || To request training on JEOL JBX-9500FSZ or Raith ELPHY e-beam writer. '''Authorization to run JEOL JBX-9500FSZ requires at least 5 training sessions.<br> Before you request for training, study this page and have all files ready:''' [[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ#Getting_started|Getting started]]. | ||
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| style="background:silver; color:black" align="left"|'''Mask order/review:''' | | style="background:silver; color:black" align="left"|'''Mask order/review:''' |
Revision as of 11:28, 28 January 2016
In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to Danchip.
Mailbox | link | Concerning |
LabAdviser Mailbox | labadviser@danchip.dtu.dk | Any questions or feedback to LabAdviser. |
Process flow review | process_flow@danchip.dtu.dk Temporary not available (AIT has removed it) Use danchipsupport@danchip.dtu.dk instead. |
More about process flow review here |
Training on equipment | training@danchip.dtu.dk | It is our goal to answer your request regarding process flow reviews and training within 2 workdays. |
E-beam training | e-beam@danchip.dtu.dk | To request training on JEOL JBX-9500FSZ or Raith ELPHY e-beam writer. Authorization to run JEOL JBX-9500FSZ requires at least 5 training sessions. Before you request for training, study this page and have all files ready: Getting started. |
Mask order/review: | More about mask design here | . |
Order only (DeltaMask) |
mask@danchip.dtu.dk (Subject: Mask Order Only) | Note Mask will be ordered from DeltaMask. Nothing will be checked in this case. Neither mask design nor specs file. Minimal feature 1.5µm.
Requires a specs file like this: (example spec file). |
Review and Order |
mask@danchip.dtu.dk (Subject: Mask Review) | . |
Metal wishes | . | . |
Lesker: |
metal@danchip.dtu.dk (Subject: Lesker Metal Wishes). | - See current and future materials here: Lesker status log |
Alcatel/Wordentec/Physimeca: |
metal@danchip.dtu.dk (Subject:PVD Metal Wishes) | . |
Tool change | toolchange@danchip.dtu.dk | Laser: change of optics and Polymer Injection Molding machine: change mold-tool |
Commercial offers etc. | sales@danchip.dtu.dk | mostly companies and external customers |
Gas-related questions | DCH-Gas@danchip.dtu.dk | issues (information regarding ordering, delivery, changing etc. Mostly for internal Danchip use |
All other inquiries | danchipsupport@danchip.dtu.dk | ... or if you are in doubt |