Revision as of 08:31, 8 September 2015

XPS data processing

You will need some kind of dedicated software in order to analyze and interpret XPS spectra. You can find many online but here we will only use the Avantage for obvious reasons. Installing it on your own PC is strongly adviced as the analysis may be time consuming.

To install Avantage, please download the latest version (175 Mb zip file)from the network drive

O:\CleanroomDrive\jml\XPS Avantage 5.948\
U:\DCH\CleanroomDrive\jml\XPS Avantage 5.948\

and run the install file. At some point a nine digit computer number (for your installation) will be given and you will be prompted for a processing licence. To get a license, write an email to nd

processing license for computer number xxx - xxx - xxx Thermo

support.service.ukegr@thermofisher.com

To access the data processing part of Avantage, pleas

Depth profile of a silicon wafer with nitride, polysilicon and oxide layer

@@ Line 1: / Line 1: @@
 = XPS data processing =
+You will need some kind of dedicated software in order to analyze and interpret XPS spectra. You can find many online but here we will only use the Avantage for obvious reasons. Installing it on your own PC is strongly adviced as the analysis may be time consuming.
+To install Avantage, please download the latest version (175 Mb zip file)from the network drive
+* O:\CleanroomDrive\jml\XPS Avantage 5.948\
+* U:\DCH\CleanroomDrive\jml\XPS Avantage 5.948\
+and run the install file. At some point a nine digit computer number (for your installation) will be given and you will be prompted for a processing licence. To get a license, write an email to
+nd
+[mailto:labadviser@danchip.dtu.dk?Subject=Standard processing license for computer number xxx - xxx - xxx Thermo]
+support.service.ukegr@thermofisher.com
+To access the data processing part of Avantage, pleas
 *[[Specific Process Knowledge/Characterization/XPS/Processing/SiliconSandwich|Depth profile of a silicon wafer with nitride, polysilicon and oxide layer]]