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Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry: Difference between revisions

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=== Typical application of SIMS ===
SIMS is the most sensitive technique for elemental composition. It is therefore ideal if you want to check doping profiles or for contaminations.
A typical application would be to check the concentration profile of boron doping in silicon. In that case one would put two samples into the SIMS.
* A reference sample with a known boron profile
* A sample
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