Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
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#Close the door and click CLOSE | #Close the door and click CLOSE | ||
#Set the autoloader back in REMOTE | #Set the autoloader back in REMOTE | ||
= Transfer of cassettes between autoloader and e-beam writer = | |||
You can load the cassette into the e-beam writer from the loader control program (Ldr) from EBX Menu. This operation requires the autoloader to be in REMOTE. | |||
'''To transfer a cassette from the autoloader into the e-beam writer:''' | |||
*Choose the right cassette from the 'Stocker' window (red dot), and | |||
*Click 'Carry in' | |||
'''To transfer a cassette from the e-beam writer to the autoloader:''' | |||
*Choose the right cassette from the 'Stocker' window (red dot) | |||
*Tick the 'EXCH EVAC' on (This is important, otherwise you'll leave the exchange chamber ventilated) | |||
*Click 'Carry out'. | |||
If you by accident unload a cassette without evacuating the exchange-chamber, you must tick 'EXCH EVAC' and load your cassette onto stage and unload it to the autoloader again. | |||