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Specific Process Knowledge/Thin film deposition/Deposition of Silicon: Difference between revisions

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Line 91: Line 91:
! Allowed substrates  
! Allowed substrates  
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|
* Silicon
* Silicon wafers
* Pyrex
* Quartz wafers
* Fused silica, , metals, oxide, nitride, blue tape
* Pyrex wafers
|Pyrex, fused silica, silicon, metals, oxide, nitride
|Pyrex, fused silica, silicon, metals, oxide, nitride
|Fused silica, Silicon, oxide, nitride
|Fused silica, Silicon, oxide, nitride
Line 101: Line 101:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
! Allowed material  
! Allowed material  
|
|    
* Silicon oxide
* Silicon (oxy)nitride
* Photoresist
* PMMA
* Mylar
* SU-8
* Metals
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|
|
|
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