Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum: Difference between revisions
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! Layer thickness | ! Layer thickness | ||
|10Å to 0.5 µm | |10Å to 0.5 µm* | ||
|10Å to 500 Å | |10Å to 500 Å | ||
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'''*''' ''For thicknesses above 200 nm permission from ThinFilm group (thinfilm@danchip.dtu.dk) is required.'' | |||