Specific Process Knowledge/Thin film deposition/Deposition of Nickel: Difference between revisions

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{| border="1" cellspacing="0" cellpadding="4"  
 
{| border="1" cellspacing="0" cellpadding="3"
|-style="background:silver; color:black"
!  
!  
! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Alcatel|Alcatel]])
! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Alcatel|Alcatel]])
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! Electroplating ([[Specific Process Knowledge/Thin film deposition/Electroplating-Ni|Electroplating-Ni]])
! Electroplating ([[Specific Process Knowledge/Thin film deposition/Electroplating-Ni|Electroplating-Ni]])
|-  
|-  
| Batch size
|-style="background:WhiteSmoke; color:black"
 
! Batch size
|
|
*Up to 1x4" wafers
*Up to 1x4" wafers
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|-
|-
| Pre-clean
|-style="background:LightGrey; color:black"
! Pre-clean
|RF Ar clean
|RF Ar clean
|RF Ar clean
|RF Ar clean
|RF Ar clean
|RF Ar clean
|None
|None
|-
|-style="background:WhiteSmoke; color:black"


|-
! Layer thickness
| Layer thickness
|10Å to 5000 Å*
|10Å to 5000 Å  
|10Å to 1 µm*
|10Å to 1 µm
|10Å to 1000 Å
|10Å to 1000 Å
|A few µm to 1400 µm
|A few µm to 1400 µm
|-
|-style="background:LightGrey; color:black"


|-
! Deposition rate
| Deposition rate
|2Å/s to 15Å/s
|2Å/s to 15Å/s
|10Å/s to 15Å/s
|10Å/s to 15Å/s
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
! Comment
! Comment
| Thicknesses above 200 nm requires special permission
|
|
|[[/Stress Wordentec Ni films|Stress in Wordentec Ni films: study here]].  
*[[/Stress Wordentec Ni films|Stress in Wordentec Ni films: study here]].  
*Thicknesses above 200 nm requires special permission
|Only very thin layers (up to 100nm).
|Only very thin layers (up to 100nm).
|Sample must be compatible with plating bath. Seed metal necessary.
|Sample must be compatible with plating bath. Seed metal necessary.
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|}
|}
'''*''' ''To deposit layers thicker then 200 nm permission is required (contact Thin film group)''

Revision as of 13:11, 6 March 2014

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Nickel deposition

Nickel can be deposited by e-beam evaporation or electroplating. In the chart below you can compare the different deposition equipment.


E-beam evaporation (Alcatel) E-beam evaporation (Wordentec) E-beam evaporation (PVD co-sputter/evaporation) Electroplating (Electroplating-Ni)
Batch size
  • Up to 1x4" wafers
  • smaller pieces
  • 24x2" wafers or
  • 6x4" wafers or
  • 6x6" wafers
  • 12x2" wafers or
  • 12x4" wafers or
  • 4x6" wafers
  • 1x2" wafer or
  • 1x4" wafer or
  • 1x6" wafer
Pre-clean RF Ar clean RF Ar clean RF Ar clean None
Layer thickness 10Å to 5000 Å* 10Å to 1 µm* 10Å to 1000 Å A few µm to 1400 µm
Deposition rate 2Å/s to 15Å/s 10Å/s to 15Å/s About 1Å/s About 10 to 250 Å/s
Comment Thicknesses above 200 nm requires special permission Only very thin layers (up to 100nm). Sample must be compatible with plating bath. Seed metal necessary.

* To deposit layers thicker then 200 nm permission is required (contact Thin film group)