Specific Process Knowledge/Thin film deposition/Wordentec

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Wordentec QCL 800

Wordendec: positioned in cleanroom 4 in the Wordentec room

The Wordentec is a machine for:

• Deposition of metal through E-beam deposition
• Deposition of metal through thermal evaporation
• Deposition of materials through DC sputtering
• Cleaning of samples before deposition through Argon RF sputter clean

The Wordentec is designed to deposit on 1-6 samples in sequence, samples of a size up to 6" in diameter. Adaptors exist for deposition on 2", 4" and 6" wafers, but deposition is possible on samples of almost any size and shape, as long as they do not exceed the size of a 6" substrate. The Wordentec supports either single sample deposition on each sample or batch deposition on six wafers in sequence. It is possible to freely combine processes from the machines different sources.

Process information

The metals available for E-beam evaporation and their standard deposition rates are:

Metal	Deposition rate [Å/s]
Titanium (Ti)	10
Chromium (Cr)	10
Aluminium (Al)	10
Nickel (Ni)	10
Platinum (Pt)	10
Gold (Au)	10

Thermal evaporation materials

We currently have Aluminium, Silver and Germanium available to deposit through thermal evaporation.

Sputter materials

It is possible to sputter deposit almost any material, provided that it is possible to deposit with DC sputtering. The materials available currently are:

• TiW alloy (10%/90% by weight)
• Aluminium (Al)
• Chromium (Cr)
• Silver (Ag)
• Titanium (Ti)
• Silicon (Si)

More information about deposition rates and surface roughness can be found by clicking on the different elements.

Overview of the performance of Wordentec and some process related parameters

Purpose	Deposition of metals	E-beam evaporation Sputtering Thermal evaporation
Performance	Film thickness	~10Å - 1µm
	Deposition rate	~2.5Å/s - 15Å/s
Process parameter range	Process Temperature	Less than 80 oC
	Process pressure	~3x10-7 - 4x10-6 mbar
Substrates	Batch size	24x2" wafers or 6x4" wafers or 6x6" wafers Deposition on one side of the substrate
	Substrate material allowed	Silicon wafers Quartz wafers Pyrex wafers
	Material allowed on the substrate	Silicon oxide Silicon (oxy)nitride Photoresist PMMA Mylar SU-8 Metals

Quality control (QC) for Wordentec

Quality control (QC) for Wordentec

QC procedure for Wordentec The newest QC data for Wordentec QC Recipe: Au Ni Deposition rate 10 Å/s 10 Å/s Thickness 1000 Å 1000 Å Pressure Below 2*10-6 Below 2*10-6 QC limits Wordentec Measured average thickness (Å) 900-1100 Å Lowest accepted deposition rate (Å/s) 6 Å/s Thickness is measured in 5 points with one of the Dektak instruments.