Specific Process Knowledge/Thin film deposition/Deposition of Platinum: Difference between revisions
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| Layer thickness | | Layer thickness | ||
|10Å to 5000Å | |10Å to 5000Å* | ||
|10Å to 5000Å | |10Å to 5000Å* | ||
|10Å to 5000Å | |10Å to 5000Å | ||
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'''*''' ''For thicknesses above 200 nm permission is required from Thin Film group.'' | |||