Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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|[[Specific_Process_Knowledge/Lithography/Coaters#Manual Spinner 1|Manual Spinner 1 (Laurell)]], [[Specific_Process_Knowledge/Lithography/Coaters#III-V Spinner|III-V Spinner]] | |[[Specific_Process_Knowledge/Lithography/Coaters#Manual Spinner 1|Manual Spinner 1 (Laurell)]], [[Specific_Process_Knowledge/Lithography/Coaters#III-V Spinner|III-V Spinner]] | ||
|X AR 600-54/6, MIBK:IPA | |X AR 600-54/6, MIBK:IPA | ||
|H2O | |IPA, H2O | ||
| | | | ||
|[[media:Process_Flow_CSAR.docx|Process_Flow_CSAR.docx]] | |[[media:Process_Flow_CSAR.docx|Process_Flow_CSAR.docx]] | ||