Template:Spinning KS Spinner: AZ: Difference between revisions
New page: *1,5 um resist use the recipe: Danchip_1,5um_4"and6" *2,2 um resist use the recipe: Danchip2_2_4" Please see the parameters for these recipes and some other suggestions in this document: |
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*1 | KS Spinner is the other option for spinning the standard thicknesses. | ||
*2 | *1.5µm resist use the recipe: Danchip_1.5um_4"and6" | ||
Please see the parameters for these recipes and some other suggestions in this document: | *2.2µm resist use the recipe: Danchip2_2_4" | ||
Please see the parameters for these recipes and some other suggestions in this document:[[media:KS Spinner_thin_resist.xls|Thin resist parameters]] | |||
Latest revision as of 10:46, 6 March 2008
KS Spinner is the other option for spinning the standard thicknesses.
- 1.5µm resist use the recipe: Danchip_1.5um_4"and6"
- 2.2µm resist use the recipe: Danchip2_2_4"
Please see the parameters for these recipes and some other suggestions in this document:Thin resist parameters