Template:Spinning Track1: Difference between revisions
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*PR1_5 for 1,5 um resist thickness | *PR1_5 for 1,5 um resist thickness | ||
*PR2_2 for 2,2 um resist thickness | *PR2_2 for 2,2 um resist thickness | ||
* | *PR4_2_BAKE for 4,2 um resist thickness | ||
If you want to see parameters for those spins please refer to this document: | If you want to see parameters for those spins please refer to this document: | ||
[[media:Recipe_from_SSI.xls|Parameters from Track1]] | [[media:Recipe_from_SSI.xls|Parameters from Track1]]. | ||
Other thin resist recepes on Track1. Please notice that we do not make quality control resist thickness measurements on these recipes: | |||
*PR1_2 | |||
*KT1_2 | |||
*JTC2_8 | |||
*JTC3_3 | |||
*JTC3_6 | |||
*JTC4_2 | |||
Latest revision as of 10:24, 16 November 2009
Track1 can be used to spin the standard thicknesses. You can use the recipes in the list below:
- PR1_5 for 1,5 um resist thickness
- PR2_2 for 2,2 um resist thickness
- PR4_2_BAKE for 4,2 um resist thickness
If you want to see parameters for those spins please refer to this document: Parameters from Track1.
Other thin resist recepes on Track1. Please notice that we do not make quality control resist thickness measurements on these recipes:
- PR1_2
- KT1_2
- JTC2_8
- JTC3_3
- JTC3_6
- JTC4_2