Template:Spinning Track1: Difference between revisions
New page: Use Trak1 and find the recipe you will use. Choose from the list: *PR1_5 for 1,5 um resist thickness *PR2_2 for 2,2 um resist thickness *PR4_2 for 4,2 um resist thickness If you want to se... |
No edit summary |
||
| (3 intermediate revisions by the same user not shown) | |||
| Line 1: | Line 1: | ||
Track1 can be used to spin the standard thicknesses. You can use the recipes in the list below: | |||
*PR1_5 for 1,5 um resist thickness | *PR1_5 for 1,5 um resist thickness | ||
*PR2_2 for 2,2 um resist thickness | *PR2_2 for 2,2 um resist thickness | ||
* | *PR4_2_BAKE for 4,2 um resist thickness | ||
If you want to see parameters for those spins please refer to this document: | If you want to see parameters for those spins please refer to this document: | ||
[[media:Recipe_from_SSI.xls|Parameters from Track1]]. | |||
Other thin resist recepes on Track1. Please notice that we do not make quality control resist thickness measurements on these recipes: | |||
*PR1_2 | |||
*KT1_2 | |||
*JTC2_8 | |||
*JTC3_3 | |||
*JTC3_6 | |||
*JTC4_2 | |||
Latest revision as of 10:24, 16 November 2009
Track1 can be used to spin the standard thicknesses. You can use the recipes in the list below:
- PR1_5 for 1,5 um resist thickness
- PR2_2 for 2,2 um resist thickness
- PR4_2_BAKE for 4,2 um resist thickness
If you want to see parameters for those spins please refer to this document: Parameters from Track1.
Other thin resist recepes on Track1. Please notice that we do not make quality control resist thickness measurements on these recipes:
- PR1_2
- KT1_2
- JTC2_8
- JTC3_3
- JTC3_6
- JTC4_2