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| '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/SPTSdocs click here]'''
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| <!--Checked for updates on 30/7-2018 - ok/jmli -->
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| <!--Checked for updates on 2/10-2020 - ok/jmli -->
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| == SPTS documents on hardware ==
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| [[Media:Pegasus_sheet_V8.pdf |Hardware Information - Overview]].
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| [[Media:Pegasus_specification_v2.4.pdf|Hardware Information - Detailed]].
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| [[Media:Pegasus_System_Description_&_Differentiation.pdf|The Advantages the Pegasus has over existing Si etchers]].
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| [[Media:Macs_v2.pdf|Robot Handling System Information ]].
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| == Process applications ==
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| [[Media:Aerospace.pdf |MEMS in Aerospace]].
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| [[Media:Bio-medical.pdf|Bio Medical]].
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| [[Media:Energy.pdf|MEMS in Energy]].
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| [[Media:Nanotechnology.pdf|Nanotechnology]].
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| [[Media:Packaging-etch.pdf |Packaging Applications]].
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| [[Media:Appl-sheets-4_markets.pdf|General Applications]].
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| == Specifically for Pegasus tools ==
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| [[Media:SPTS High Flow Plenum Upgrade for Pegasus Nov 2012.pdf|High Flow Plenum Upgrade]]
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| [[Media:Claritas_February_2012.pdf|Claritas Endpoint Detection System]]
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