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In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab - Fabrication (formerly known as Danchip).<br />


{| border="2" cellspacing="0" cellpadding="10"  
In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab (formerly known as Danchip).<br />
 
{| border="2" cellspacing="0" cellpadding="10" align="left"
|-
| style="background:silver; color:black" | '''Subject'''
| align="center" style="background:silver; color:black" | '''Email'''
| align="center" style="background:silver; color:black" | '''Description'''
|-
 
|-
| style="background:WhiteSmoke; color:black" | '''Training and Process Flow'''
| align="center" style="background:WhiteSmoke; color:black" | [mailto:training@nanolab.dtu.dk?Subject=⟨user%20name⟩%20⟨subject⟩ training@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" | All requests regarding equipment training and process flows. Please add your Name to the subject line.<BR><BR> <i>Note: Requests are commonly answered within 2 workdays. </i>
|-
|-
| style="background:silver; color:black" align="left"|'''Mailbox'''
 
| align="center" style="background:LightGrey; color:black"| '''link'''
| align="center" style="background:LightGrey; color:black"| '''Concerning'''
|-
|-
| style="background:LightGrey; color:black" align="left"| '''LabAdviser Mailbox'''
| style="background: LightGrey; color:black" | '''E-beam training'''
| style="background:WhiteSmoke; color:black" | [mailto:labadviser@nanolab.dtu.dk labadviser@nanolab.dtu.dk]
| align="center" style="background: LightGrey; color:black" | [mailto:e-beam@nanolab.dtu.dk e-beam@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" | Any questions or feedback to LabAdviser.  
| style="background: LightGrey; color:black" | Requests regarding training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. Please study the material on [[Specific Process Knowledge/Lithography/EBeamLithography|the EBL Labadviser pages]] beforehand.
|-
|-
| style="background:silver; color:black" align="left"| '''Process flow review'''
 
|| [mailto:process_flow@nanolab.dtu.dk process_flow@nanolab.dtu.dk] (should work again)
|| More about process flow review [[Process_flow_approval|here]]
|-
|-
| style="background:LightGrey; color:black" align="left"|'''Training on equipment'''
| style="background:WhiteSmoke; color:black" | '''E-beam Cassette loading'''
| style="background:WhiteSmoke; color:black" |[mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]
| align="center" style="background:WhiteSmoke; color:black" | [mailto:e-beamload@nanolab.dtu.dk e-beamload@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" | It is our goal to answer your request regarding process flow reviews and training within 2 workdays.
| style="background:WhiteSmoke; color:black" | Requests regarding cassette loading on JEOL JBX-9500FSZ.
|-
|-
| style="background:silver; color:black" align="left"| '''E-beam training'''
 
|| [mailto:e-beam@nanolab.dtu.dk e-beam@nanolab.dtu.dk]<br> [mailto:e-beamload@nanolab.dtu.dk e-beamload@nanolab.dtu.dk]
|| To request training on JEOL JBX-9500FSZ or Raith ELPHY e-beam writer. <br> '''Authorization to run JEOL JBX-9500FSZ requires at least 4 training sessions. Before you request for training on this machine, study this page and have all files ready:''' [[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ#Getting_started|Getting started]].
|-
|-
| style="background:LightGrey; color:black" align="left"|'''Mask order/review:'''
| style="background: LightGrey; color:black" | '''General inquiries'''
||  
| align="center" style="background: LightGrey; color:black"  | [mailto:nanolabsupport@nanolab.dtu.dk?subject=⟨user%20name⟩%20⟨subject⟩ nanolabsupport@nanolab.dtu.dk]
|| Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering [[Specific_Process_Knowledge/Pattern_Design#Mask Ordering and Fabrication|here]]. It requires a specification file like this: ([[mask_spec|example spec file]]) and a design file (gds or cif format).
| style="background: LightGrey; color:black"  | Inquiries related to machines, cleanroom access, Mask review, tool changes, and others. Please add your Name to the subject line. <BR><BR> <i>Note: Requests are commonly answered within 2 workdays. </i>
|-
|-
| style="background:silver; color:black" align="left"|
 
'''Mask Review'''
|| [mailto:mask@nanolab.dtu.dk?Subject=Mask%20Review&body=Please%20review%20the%20attached%20mask. mask@nanolab.dtu.dk (Subject: Mask Review)]
|| Note: You have to order masks at Compugraphics via Procure.
Nanolab can offer a check of the mask design and specifications. You can read more about mask design [[Specific_Process_Knowledge/Pattern_Design#Pattern Design|here]].
|-
|-
| style="background:LightGrey; color:black" align="left" | '''Metal wishes'''
| style="background:WhiteSmoke; color:black" | '''Metal Wishes'''
| style="background:WhiteSmoke; color:black" |  .  
| align="center" style="background:WhiteSmoke; color:black" |  [mailto:metal@nanolab.dtu.dk metal@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" | .
| style="background:WhiteSmoke; color:black"   | Requests for change of metal in Thin Film Deposition equipment. <BR> See current and future materials in statuslog of the respective machines.
 
<BR>
[http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=244&type=status Lesker - status log]
<BR>
[http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=429&type=status E-Beam Evaporator (Temescal) - status log]
<BR>
[https://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=511&type=status E-Beam Evaporator (10-pockets) - status log]
<BR>
[https://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=441&type=status Sputter-System Metal-Oxide(PC1) - status log]
<BR>
[https://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=442&type=status Sputter-System Metal-Nitride(PC3) - logbook]
<BR><BR> <i>For requests regarding Wordentec, please contact the Thin Film group directly.</i>
|-
|-
| style="background:silver; color:black" align="left"|
 
'''Lesker:'''
| style="background:WhiteSmoke; color:black" |  [mailto:metal@nanolab.dtu.dk?Subject=Lesker%20Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20the%20Lesker%20from%20the%20period%20starting%20on%20Thursday%20DD%20MMM%20YYYY: metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes)].
| style="background:WhiteSmoke; color:black" |  - See current and future materials here: [http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=244&type=status Lesker status log]
|-
|-
| style="background:LightGrey; color:black" align="left"|  
| style="background: LightGrey; color:black" | '''Gas-related Requests'''  
'''Temescal/Wordentec/Physimeca:'''  
| align="center" style="background: LightGrey; color:black" |   [mailto:DCH-Gas@nanolab.dtu.dk DCH-Gas@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" | [mailto:pvd@nanolab.dtu.dk?Subject=Alcatel/Wordentec/Physimeca%20Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20%0A%0DThe%20Alcatel%20from%20the%20period%20starting%20on%20Tuesday%20DD%20MMM%20YYYY:%0A%0DThe%20Wordentec%20from%20the%20period%20starting%20on%20Tuesday/Friday%20DD%20MMM%20YYYY:%0A%0DThe%20Physimeca%20from%20the%20period%20starting%20on%20Wednessday%20DD%20MMM%20YYYY: metal@nanolab.dtu.dk (Subject:PVD Metal Wishes)]
| style="background: LightGrey; color:black" |   All topics gas-related (issues, information regarding ordering, delivery, changing etc). Mostly for internal DTU Nanolab use.
| style="background:WhiteSmoke; color:black" | .
|-
|-
| style="background:Silver; color:black" align="left"| '''Tool change'''
 
| style="background:WhiteSmoke; color:black" | [mailto:toolchange@nanolab.dtu.dk toolchange@nanolab.dtu.dk]
 
| style="background:WhiteSmoke; color:black" |  Laser: change of optics and <br /> Polymer Injection Molding machine: change mold-tool
|-
|-
| style="background:LightGrey; color:black" align="left"| '''Commercial offers etc.'''
| style="background:WhiteSmoke; color:black" | '''LabAdviser Mailbox'''
||[mailto:sales@nanolab.dtu.dk sales@nanolab.dtu.dk]
| align="center" style="background:WhiteSmoke; color:black" | [mailto:labadviser@nanolab.dtu.dk?Subject=Feedback%20to%20Labadviser labadviser@nanolab.dtu.dk]
||mostly companies nanolabexternal customers
| style="background:WhiteSmoke; color:black" | Any questions or feedback to LabAdviser.
|-
|-
| style="background:Silver; color:black" align="left"| '''Gas-related questions'''
 
| style="background:WhiteSmoke; color:black" |  [mailto:DCH-Gas@nanolab.dtu.dk DCH-Gas@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" |  issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use
|-
|-
| style="background:LightGrey; color:black" align="left"| '''All other inquiries'''
| style="background: LightGrey; color:black" | '''Commercial Inquiries'''
|| [mailto:danchipsupport@nanolab.dtu.dk danchipsupport@nanolab.dtu.dk]
| align="center" style="background: LightGrey; color:black" |   [mailto:sales@nanolab.dtu.dk sales@nanolab.dtu.dk]
|| ... or if you are in doubt
| style="background: LightGrey; color:black" |  For all inquiries regarding in-sourcing, commercial applications, rent of cleanroom space, etc
|-  
|-  
|}
|}

Latest revision as of 08:30, 13 May 2024

In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab (formerly known as Danchip).

Subject Email Description
Training and Process Flow training@nanolab.dtu.dk All requests regarding equipment training and process flows. Please add your Name to the subject line.

Note: Requests are commonly answered within 2 workdays.
E-beam training e-beam@nanolab.dtu.dk Requests regarding training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. Please study the material on the EBL Labadviser pages beforehand.
E-beam Cassette loading e-beamload@nanolab.dtu.dk Requests regarding cassette loading on JEOL JBX-9500FSZ.
General inquiries nanolabsupport@nanolab.dtu.dk Inquiries related to machines, cleanroom access, Mask review, tool changes, and others. Please add your Name to the subject line.

Note: Requests are commonly answered within 2 workdays.
Metal Wishes metal@nanolab.dtu.dk Requests for change of metal in Thin Film Deposition equipment.
See current and future materials in statuslog of the respective machines.


Lesker - status log
E-Beam Evaporator (Temescal) - status log
E-Beam Evaporator (10-pockets) - status log
Sputter-System Metal-Oxide(PC1) - status log
Sputter-System Metal-Nitride(PC3) - logbook

For requests regarding Wordentec, please contact the Thin Film group directly.

Gas-related Requests DCH-Gas@nanolab.dtu.dk All topics gas-related (issues, information regarding ordering, delivery, changing etc). Mostly for internal DTU Nanolab use.
LabAdviser Mailbox labadviser@nanolab.dtu.dk Any questions or feedback to LabAdviser.
Commercial Inquiries sales@nanolab.dtu.dk For all inquiries regarding in-sourcing, commercial applications, rent of cleanroom space, etc
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