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== The A-line field ==
== The A-line field ==
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[[Image:travka-Aline-figure.jpg |300x300px|thumb|Definition of the measures used in the table below]]
[[Image:travka-Aline-figure.jpg |300x300px|thumb|Definition of the measures used in the table below]]
Latest revision as of 11:33, 28 June 2023
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Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab
The A-line field Definition of the measures used in the table below The A-line fields have trenches of different widths across the entire 1 cm height of the field. The pitch of the trenches is matched to the exposed area of each mask. The list of trench widths in each field is the same on all masks (due to the high exposed area the widths 2 and 3 µm are missing on the travka 65 mask, on the 80 mask the lines 2, 3, 4 and 6 are missing).
The A-line fields are located along a cleavage line on the wafer with T-ridge fields. Cleaving across these two types of fields provide the possibility of inspecting trench depths and widths as a function of exposed area.
Travka 05 A-line field
Travka 05: A-line 2 µm to 25 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
2
38
40
2
80
3
57
60
3
180
4
76
80
2
160
6
114
120
1
120
8
152
160
1
160
10
190
200
1
200
15
285
300
1
300
25
475
500
1
500
Travka 05: A-line 40 µm to 300 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
40
760
800
1
800
50
950
1000
1
1000
75
1425
1500
1
1500
100
1900
2000
1
2000
150
2850
3000
1
3000
200
3800
4000
1
4000
300
5700
6000
1
6000
Travka 10 A-line field
Travka 10: A-line 2 µm to 25 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
2
18
20
25
500
3
27
30
30
900
4
36
40
30
1200
6
54
60
10
600
8
72
80
10
800
10
90
100
10
1000
15
135
150
5
750
25
225
250
5
1250
Travka 10: A-line 40 µm to 300 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
40
360
400
5
2000
50
450
500
2
1000
75
675
750
2
1500
100
900
1000
2
2000
150
1350
1500
1
1500
200
1800
2000
1
2000
300
2700
3000
1
3000
Travka 20 A-line field
Travka 20: A-line 2 µm to 25 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
2
8
10
50
500
3
12
15
60
900
4
16
20
60
1200
6
24
30
20
600
8
32
40
20
800
10
40
50
20
1000
15
60
75
10
750
25
100
125
10
1250
Travka 20: A-line 40 µm to 300 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
40
160
200
10
2000
50
200
250
4
1000
75
300
375
4
1500
100
400
500
4
2000
150
600
750
2
1500
200
800
1000
2
2000
300
1200
1500
2
3000
Travka 35 A-line field
Travka 35: A-line 2 µm to 25 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
2
3,7
5,7
80
457,1
3
5,6
8,6
80
685,7
4
7,4
11,4
61
697,1
6
11,1
17,1
51
874,3
8
14,9
22,9
50
1142,9
10
18,6
28,6
50
1428,6
15
27,9
42,9
20
857,1
25
46,4
71,4
20
1428,6
Travka 35: A-line 40 µm to 300 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
40
74,3
114,3
20
2285,7
50
92,9
142,9
10
1428,6
75
139,3
214,3
10
2142,9
100
185,7
285,7
10
2857,1
150
278,6
428,6
2
857,1
200
371,4
571,4
2
1142,9
300
557,1
857,1
2
1714,3
Travka 50 A-line field
Travka 50: A-line 2 µm to 25 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
2
2
4
145
580
3
3
6
150
900
4
4
8
140
1120
6
6
12
50
600
8
8
16
50
800
10
10
20
50
1000
15
15
30
25
750
25
25
50
25
1250
Travka 50: A-line 40 µm to 300 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
40
40
80
25
2000
50
50
100
10
1000
75
75
150
10
1500
100
100
200
10
2000
150
150
300
5
1500
200
200
400
5
2000
300
300
600
5
3000
Travka 65 A-line field
Travka 65: A-line 2 µm to 25 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
2
1,1
3,1
0
0
3
1,6
4,6
0
0
4
2,2
6,2
144
892,8
6
3,2
9,2
120
1104
8
4,3
12,3
100
1230
10
5,4
15,4
100
1540
15
8,1
23,1
25
577,5
25
13,5
38,5
25
962,5
Travka 65: A-line 40 µm to 300 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
40
21,5
61,5
25
1537,5
50
26,9
76,9
12
922,8
75
40,4
115,4
12
1384,8
100
53,8
153,8
12
1845,6
150
80,8
230,8
8
1846,4
200
107,7
307,7
8
2461,6
300
161,5
461,5
8
3692
Travka 80 A-line field
Travka 80: A-line 2 µm to 25 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
2
0,5
2,5
0
0
3
0,8
3,8
0
0
4
1,0
5
0
0
6
1,5
7,5
0
0
8
2,0
10
96
960
10
2,5
12,5
90
1125
15
3,8
18,8
80
1504
25
6,3
31,3
50
1565
Travka 80: A-line 40 µm to 300 µm fields
Trench width (µm)
Ridge width (µm)
Period width (µm)
Total periods
Width of array (µm)
40
10,0
50
50
2500
50
12,5
62,5
15
937,5
75
18,8
93,8
15
1407
100
25,0
125
15
1875
150
37,5
187,5
10
1875
200
50,0
250
10
2500
300
75,0
375
10
3750
