LabAdviser/Technology Research/Microfabrication of Hard x-ray Lenses: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@ | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Technology_Research/Microfabrication_of_Hard_x-ray_Lenses click here]''' | ||
=Microfabrication of Hard x-ray Lenses= | =Microfabrication of Hard x-ray Lenses= | ||
*'''Project type:''' Ph.d project | *'''Project type:''' Ph.d project | ||
*'''Project responsible:''' Frederik Stöhr | *'''Project responsible:''' Frederik Stöhr | ||
*'''Partners involved:''' DTU Physics, DTU Danchip, DTU Nanotech | *'''Partners involved:''' DTU Physics, DTU Nanolab (former DTU Danchip), DTU Nanotech | ||
*Link to the Ph.d. thesis | *'''Link to the Ph.d. thesis:''' https://orbit.dtu.dk/en/publications/microfabrication-of-hard-x-ray-lenses | ||
==Project description (Summery of Ph.d. thesis)== | ==Project description (Summery of Ph.d. thesis)== | ||
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===Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon X-ray lenses=== | ===Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon X-ray lenses=== | ||
Stöhr F, Michael-Lindhard J, Hübner J, Jensen F, Simons H, Jakobsen A C, Poulsen H F and Hansen O. 2015 Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon X-ray lenses. Journal of Vacuum Science and Technology B 33(6), 062001 [http://dx.doi.org/10.1116/1.4931622 LINK] | Stöhr F, Michael-Lindhard J, Hübner J, Jensen F, Simons H, Jakobsen A C, Poulsen H F and Hansen O. 2015 Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon X-ray lenses. Journal of Vacuum Science and Technology B 33(6), 062001 [http://dx.doi.org/10.1116/1.4931622 LINK] | ||
===Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy=== | ===Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy=== | ||